List of works - Shiyuan Liu

2D Layered Material-Based van der Waals Heterostructures for Optoelectronics

Accurate characterization of nanoimprinted resist patterns using Mueller matrix ellipsometry

scientific article published on 01 June 2014

Attitude metrology based on the field-of-view effect of birefringence using high-speed polarimetry

scientific article published on 01 April 2020

Calibration of misalignment errors in composite waveplates using Mueller matrix ellipsometry.

scientific article published on February 2015

Complex Optical Conductivity of Two-Dimensional MoS2: A Striking Layer Dependency

scientific article published on 03 October 2019

Comprehensive characterization of a general composite waveplate by spectroscopic Mueller matrix polarimetry

scientific article published on 01 September 2018

Convolution-variation separation method for efficient modeling of optical lithography

scientific article published on 01 July 2013

Development of a spectroscopic Mueller matrix imaging ellipsometer for nanostructure metrology

scientific article

Development of a tomographic Mueller-matrix scatterometer for nanostructure metrology

scientific article published on 01 July 2018

Efficient representation of mask transmittance functions for vectorial lithography simulations

scientific article published on 01 December 2014

Efficient source mask optimization with Zernike polynomial functions for source representation.

scientific article published in February 2014

Fabrication and Properties of Dual-Level Hierarchical Structures Mimicking Gecko Foot Hairs

scientific article published on February 1, 2013

Fitting-determined formulation of effective medium approximation for 3D trench structures in model-based infrared reflectrometry.

scientific article published in February 2011

Flexible Perovskite Solar Cells via Surface-Confined Silver Nanoparticles on Transparent Polyimide Substrates

scientific article published on 06 March 2019

High-throughput dielectrophoretic manipulation of bioparticles within fluids through biocompatible three-dimensional microelectrode array.

scientific article

Illumination source optimization in optical lithography via derivative-free optimization

scientific article published on 01 December 2014

Improved deep-etched multilayer grating reconstruction by considering etching anisotropy and abnormal errors in optical scatterometry

scientific article published on 01 February 2015

Improved measurement accuracy in optical scatterometry using correction-based library search

scientific article

In-line wavefront aberration adjustment of a projection lens for a lithographic tool using the dominant mode method

scientific article published on 01 May 2019

Layer-dependent dielectric and optical properties of centimeter-scale 2D WSe2: evolution from a single layer to few layers

scientific article published on 04 September 2019

Mueller matrix imaging ellipsometry for nanostructure metrology

scientific article published in June 2015

Multiobjective optimization for target design in diffraction-based overlay metrology

scientific article published on 01 March 2020

Nonuniform depolarization properties of typical nanostructures and potential applications

scientific article published on 01 April 2020

Numerical analysis of transmission efficiency for parabolic optical fiber nano-probe.

scientific article published in November 2013

On the limits of low-numerical-aperture imaging scatterometry

scientific article published on 01 March 2020

Optimal design of 3-D carbon microelectrode array for dielectrophoretic manipulation of nanoparticles in fluids

scientific article published on 01 December 2011

Robust and efficient inverse mask synthesis with basis function representation

scientific article published in December 2014

Robust solution to the inverse problem in optical scatterometry.

scientific article published in September 2014

Simulation method for study on outcoupling characteristics of stratified anisotropic OLEDs

scientific article published on 01 August 2019

Sparse nonlinear inverse imaging for shot count reduction in inverse lithography

scientific article published in October 2015

Ultrathin Polymer Nanofibrils for Solar-Blind Deep Ultraviolet Light Photodetectors Application

scientific article published on 06 December 2019

Wide field-of-view angle linear retarder with an ultra-flat retardance response

scientific article published on 01 June 2019

List of works by Shiyuan Liu

2D Layered Material-Based van der Waals Heterostructures for Optoelectronics

Accurate characterization of nanoimprinted resist patterns using Mueller matrix ellipsometry

Attitude metrology based on the field-of-view effect of birefringence using high-speed polarimetry

Calibration of misalignment errors in composite waveplates using Mueller matrix ellipsometry.

Complex Optical Conductivity of Two-Dimensional MoS2: A Striking Layer Dependency

Comprehensive characterization of a general composite waveplate by spectroscopic Mueller matrix polarimetry

Convolution-variation separation method for efficient modeling of optical lithography

Development of a spectroscopic Mueller matrix imaging ellipsometer for nanostructure metrology

Development of a tomographic Mueller-matrix scatterometer for nanostructure metrology

Efficient representation of mask transmittance functions for vectorial lithography simulations

Efficient source mask optimization with Zernike polynomial functions for source representation.

Fabrication and Properties of Dual-Level Hierarchical Structures Mimicking Gecko Foot Hairs

Fitting-determined formulation of effective medium approximation for 3D trench structures in model-based infrared reflectrometry.

Flexible Perovskite Solar Cells via Surface-Confined Silver Nanoparticles on Transparent Polyimide Substrates

High-throughput dielectrophoretic manipulation of bioparticles within fluids through biocompatible three-dimensional microelectrode array.

Illumination source optimization in optical lithography via derivative-free optimization

Improved deep-etched multilayer grating reconstruction by considering etching anisotropy and abnormal errors in optical scatterometry

Improved measurement accuracy in optical scatterometry using correction-based library search

In-line wavefront aberration adjustment of a projection lens for a lithographic tool using the dominant mode method

Layer-dependent dielectric and optical properties of centimeter-scale 2D WSe2: evolution from a single layer to few layers

Mueller matrix imaging ellipsometry for nanostructure metrology

Multiobjective optimization for target design in diffraction-based overlay metrology

Nonuniform depolarization properties of typical nanostructures and potential applications

Numerical analysis of transmission efficiency for parabolic optical fiber nano-probe.

On the limits of low-numerical-aperture imaging scatterometry

Optimal design of 3-D carbon microelectrode array for dielectrophoretic manipulation of nanoparticles in fluids

Robust and efficient inverse mask synthesis with basis function representation

Robust solution to the inverse problem in optical scatterometry.

Simulation method for study on outcoupling characteristics of stratified anisotropic OLEDs

Sparse nonlinear inverse imaging for shot count reduction in inverse lithography

Ultrathin Polymer Nanofibrils for Solar-Blind Deep Ultraviolet Light Photodetectors Application

Wide field-of-view angle linear retarder with an ultra-flat retardance response