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List of works by Lukas Mai

Atomic/molecular layer deposition of Cu-organic thin films

article

Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor

CVD-grown copper tungstate thin films for solar water splitting

From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications

scientific article published on 28 April 2020

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Tin(IV) Oxide from a Functionalized Alkyl Precursor: Fabrication and Evaluation of SnO2-Based Thin-Film Transistor Devices

scientific article published on 09 January 2019

Nanostructured Fe2 O3 Processing via Water-Assisted ALD and Low-Temperature CVD from a Versatile Iron Ketoiminate Precursor

PEALD of SiO2 and Al2O3 thin films on polypropylene: Investigations of the film growth at the interface, stress and gas barrier properties of dyads

scientific article published on 17 January 2018

Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide

scientific article published on 26 April 2019

Synthesis of rare-earth metal and rare-earth metal-fluoride nanoparticles in ionic liquids and propylene carbonate.

scientific article published on 28 June 2018

Unearthing [3-(Dimethylamino)propyl]aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2 O3 : Synthesis, Characterization and ALD Process Development.

scientific article published on 30 June 2017

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