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List of works by Ronald M Pearlstein

Density functional theory study on the full ALD process of silicon nitride thin film deposition via BDEAS or BTBAS and NH3

scientific article published on 01 September 2014

First-Principles Study of a Full Cycle of Atomic Layer Deposition of SiO2Thin Films with Di(sec-butylamino)silane and Ozone

High gas storage capacities for ionic liquids through chemical complexation

scientific article published on 19 December 2007

In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride

scientific article published on 30 January 2018

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