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List of works by Xiuguo Chen

A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions

scientific article published on 30 January 2018

Development of a tomographic Mueller-matrix scatterometer for nanostructure metrology

scientific article published on 01 July 2018

Improved measurement accuracy in optical scatterometry using correction-based library search

scientific article

Layer-dependent dielectric and optical properties of centimeter-scale 2D WSe2: evolution from a single layer to few layers

scientific article published on 04 September 2019

Robust solution to the inverse problem in optical scatterometry.

scientific article published in September 2014

Ultrathin Polymer Nanofibrils for Solar-Blind Deep Ultraviolet Light Photodetectors Application

scientific article published on 06 December 2019

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