List of works by Kai Arstila

A CMOS Compatible Carbon Nanotube Growth Approach

scientific article

A low valent metalorganic precursor for the growth of tungsten nitride thin films by atomic layer deposition

scientific article

Achieving epitaxy and intense luminescence in Ge∕Rb-implanted α-quartz

scientific article

Analysis of thin high-k and silicide films by means of heavy ion time-of-flight forward-scattering spectrometry

Antiferromagnetism and p‐type conductivity of nonstoichiometric nickel oxide thin films

scientific article

Atomic Layer Deposition of Ga2O3 Films from a Dialkylamido-Based Precursor

scientific article

Atomic Layer Deposition of LaF3 Thin Films using La(thd)3 and TiF4 as Precursors

scientific article

Atomic Layer Deposition of Molybdenum Nitride Thin Films for Cu Metallizations

scientific article

Atomic Layer Deposition of Ruthenium Thin Films from Ru(thd)3 and Oxygen

Atomic layer deposition of noble metals: Exploration of the low limit of the deposition temperature

scientific article published in November 2004

Atomic layer deposition of tungsten(III) oxide thin films from W2(NMe2)6 and water: precursor-based control of oxidation state in the thin film material

scientific article published on 01 August 2006

Bayesian data analysis for ERDA measurements

scientific article

Beryllium accumulation at the inner divertor of JET

scientific article

Carbon nanotube growth for through silicon via application

scientific article published on 6 March 2013

Cathodoluminescence during epitaxy in Rb-ion irradiated α-quartz

scientific article

Cellulose nanofibrils prepared by gentle drying methods reveal the limits of helium ion microscopy imaging

scientific article

Characterization and Electrochemical Properties of Oxygenated Amorphous Carbon (a-C) Films

Characterization of high and low k dielectrica using low-energy Time of Flight Elastic Recoil Detection

Composition Quantification of Microelectronics Multilayer Thin Films by EDX: Toward Small Scale Analysis

scientific article

Compressively strained SiGe band-to-band tunneling model calibration based on p-i-n diodes and prospect of strained SiGe tunneling field-effect transistors

scientific article

Considerations about multiple and plural scattering in heavy-ion low-energy ERDA

Cover Image

Damage production in GaAs and GaAsN induced by light and heavy ions

scientific article published in September 2006

Depth profiling of Al2O3+TiO2 nanolaminates by means of a time-of-flight energy spectrometer

article published in 2011

Depth resolution optimization for low-energy ERDA

Design and performance of an impedance-detuned high-contrast vertical cavity semiconductor switch

scientific article

Detection efficiency of time-of-flight energy elastic recoil detection analysis systems

Detection of failure sites by focused ion beam and nano-probing in the interconnect of three-dimensional stacked circuit structures

scientific article

Diamond nano-particle seeding for tip moulding application

scientific article

Diamond tips for automated electrical probing inside a scanning electron microscopy system

scientific article

Effect of Boron Doping on the Wear Behavior of the Growth and Nucleation Surfaces of Micro- and Nanocrystalline Diamond Films

scientific article published on 5 September 2016

Effect of Hot Dip Galvanized Steel Surface Chemistry and Morphology on Titanium Hexafluoride Pretreatment

scientific article

Effects of Interfacial Strength and Dimension of Structures on Physical Cleaning Window

scientific article

Effects of heavy-ion and light-ion irradiation on the room temperature carrier dynamics of InGaAs/GaAs quantum wells

Effects of pyrolysis temperature on the hydrologically relevant porosity of willow biochar

scientific article

Effects of surface roughness on results in elastic recoil detection measurements

Elastic recoil detection analysis of 3He

Electrical properties of C4+ irradiated single-walled carbon nanotube paper

article

Electrical results of vertical Si N-Tunnel FETs

scientific article

Energy loss and straggling of MeV Si ions in gases

Gadolinium oxide thin films by atomic layer deposition

Generalized Noise Study of Solid-State Nanopores at Low Frequencies.

scientific article published on 10 February 2017

Heavy ion induced Ti X-ray satellite structure for Ti, TiN, and TiO2 thin films

HfO[sub 2] Films Grown by ALD Using Cyclopentadienyl-Type Precursors and H[sub 2]O or O[sub 3] as Oxygen Source

scientific article

High Growth Rate of Erbium Oxide Thin Films in Atomic Layer Deposition from (CpMe)3Er and Water Precursors

scientific article

How and why does willow biochar increase a clay soil water retention capacity?

scientific article

Hydrogen and Deuterium Incorporation in ZnO Films Grown by Atomic Layer Deposition

scientific article

Identifying yeasts using surface enhanced Raman spectroscopy

scientific article published on 13 April 2019

Impact of process and geometrical parameters on the electrical characteristics of vertical nanowire silicon n-TFETs

scientific article

Increasing the Stiffness of SWCNT Bucky Paper by Heavy Ion Irradiation

article by Ari Salmi et al published 2007 in AIP Conference Proceedings

Integration of Vertical Carbon Nanotube Bundles for Interconnects

scientific article

International Atomic Energy Agency intercomparison of ion beam analysis software

scientific article

Ion-sputtering deposition of Ca–P–O films for microscopic imaging of osteoblast cells

Lifetimes of the lowest 5/2(+) and 9/2(+) states in the mirror nuclei 23Na-23Mg

scientific article published on 01 August 1990

Light and heavy ion effects on damage clustering in GaAs quantum wells

scientific article published in April 2007

Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition

scientific article

Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films

Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects

scientific article published on 17 January 2011

Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition

scientific article

Metal surface nucleated supercritical fluid–solid–solid growth of Si and Ge/SiOx core–shell nanowires

article

Metal/High-K Interface Interactions Upon High Temperature Annealing - Are They Cause of Workfunction Changes

scientific article

Microfabricated diamond tip for nanoprobing

scientific article

Modification of ALE-grown SrS thin films by ion implantation of Cu and codopants

Monte Carlo simulation of multiple and plural scattering in elastic recoil detection

article published in 2001

Monte Carlo simulations of multiple scattering effects in ERD measurements

scientific article published in June 2004

Multiple scattering of MeV ions: Comparison between the analytical theory and Monte-Carlo and molecular dynamics simulations

scientific article published in August 2006

Nanoporous kaolin—cellulose nanofibril composites for printed electronics

scientific article

Nanoprober-Based Pick-and-Place Process for Site-Specific Characterization of Individual Carbon Nanotubes

scientific article

Nanoprober-based EBIC measurements for nanowire transistor structures

scientific article

Nanorod orientation control by swift heavy ion irradiation

scientific article published on 25 April 2022

Ni+-irradiated InGaAs/GaAs quantum wells: picosecond carrier dynamics

Novel ALD Process for Depositing CaF2 Thin Films

scientific article

Nucleation and growth of ZnO on PMMA by low-temperature atomic layer deposition

Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope

scientific article

Optical properties of ion irradiated and annealed InGaAs/GaAs quantum wells and semiconductor saturable absorber mirrors

scientific article

Plasmonic Nanosensor Array for Multiplexed DNA-based Pathogen Detection

scientific article published on 04 February 2019

Potku – New analysis software for heavy ion elastic recoil detection analysis

article

Radical Enhanced Atomic Layer Deposition of Titanium Dioxide

scientific article

Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films

article published in 2005

Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates

scientific article

Retention of Pb isotopes in glass surfaces for retrospective assessment of radon exposure

scientific article

Room-temperature self-annealing of heavy-ion-irradiated InGaAs∕GaAs quantum wells

Room‐Temperature Micropillar Growth of Lithium–Titanate–Carbon Composite Structures by Self‐Biased Direct Current Magnetron Sputtering for Lithium Ion Microbatteries

scientific article

Scattering of Ions beyond the Single Scattering Critical Angle in HIERDA

scientific article

Seedless Templated Growth of Hetero-Nanostructures for Novel Microelectronics Devices

scientific article

Simulations on time-of-flight ERDA spectrometer performance

scientific article

Skewness of energy-loss straggling and multiple-scattering energy distributions

scientific article

Stopping power for low-velocity Mg ions in Si, Ge, and GaAs

scientific article published on 01 June 1991

Stopping power for low-velocity heavy ions: (0-1.0)-MeV/nucleon Mg ions in 17 (Z=22-79) elemental solids

scientific article published on 01 April 1990

Structural investigation of re-deposited layers in JET

Study of a novel ALD process for depositing MgF2 thin films

scientific article

Suitability of some common polymer films for MeV proton beam dosimetry

Summary of “IAEA intercomparison of IBA software”

scientific article

TOF-ERDA spectrometry applied for the analysis of Be migration in (100) GaAs

The analysis of a thin SiO2/Si3N4/SiO2 stack: A comparative study of low-energy heavy ion elastic recoil detection, high-resolution Rutherford backscattering and secondary ion mass spectrometry

The evolution of pseudo-spherical silicon nanocrystals to tetrahedra, mediated by phosphonic acid surfactants.

scientific article

The growth and diffusion barrier properties of atomic layer deposited NbNx thin films

The growth of ErxGa2−xO3films by atomic layer deposition from two different precursor systems

scientific article

Theαandγplasma modes in plasma-enhanced atomic layer deposition with O2–N2capacitive discharges

Thin film nanolaminate analysis by simultaneous heavy ion recoil and X-ray spectrometry

TiN scanning probes for electrical profiling of nanoelectronics device structures

scientific article

Time-of-flight telescope for heavy-ion RBS

Towards the Understanding of Resistive Contrast Imaging in in-situ Dielectric Breakdown Studies Using a Nanoprober Setup

scientific article

Ultrafast dynamics of Ni+-irradiated and annealed GaInAs/InP multiple quantum wells

scientific article published on 16 June 2006

What Determines the Electrochemical Properties of Nitrogenated Amorphous Carbon Thin Films?

scientific article

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