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List of works by Paul Muralt

A highly sensitive Pb(Zr,Ti)O3 thin film ultrasonic micro-sensor with a grooved diaphragm

scientific article published in December 2007

A micro-solid oxide fuel cell system as battery replacement

scientific article published in February 2008

A thermally self-sustained micro-power plant with integrated micro-solid oxide fuel cells, micro-reformer and functional micro-fluidic carrier

scientific article published in July 2014

Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces

scholarly article

Admittance matrix of a trapezoidal piezoelectric heterogeneous bimorph

scientific article published on 01 December 2012

Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5.

scientific article published on 19 November 2018

All-fiber phase modulator based on lead zirconate titanate thin-film coating

Annealing effect on dislocations in SrTiO3∕LaAlO3 heterostructures

Atomically engineered interfaces yield extraordinary electrostriction

scientific article published on 21 September 2022

Bandpass filters for 8 GHz using solidly mounted bulk acoustic wave resonators.

scientific article

Characterization of PZT thin films for micromotors

Characterization of sol-gel Pb(Zr0.53Ti0.47O3) in thin film bulk acoustic resonators

scientific article

Comparable measurements and modeling of piezoelectric thin films for MEMS application

Comparison of lead zirconate titanate thin films for microelectromechanical energy harvester with interdigitated and parallel plate electrodes

scientific article published on 01 August 2013

DC bias dependent shift of resonance frequencies in BST thin film membranes

article

DC bias-dependent shift of the resonance frequencies in BST thin film membranes

scientific article published in December 2007

Design of novel thin-film piezoelectric accelerometer

Dimensional and Structural Control of Silica Aerogel Membranes for Miniaturized Motionless Gas Pumps

scientific article published on 5 August 2015

Domain Pinning: Comparison of Hafnia and PZT Based Ferroelectrics

Effect of oxygen defects blocking barriers on gadolinium doped ceria (GDC) electro-chemo-mechanical properties

scholarly article

Effects of Film Orientation on Ferroelectric and Piezoelectric Properties of Lanthanoid-Substituted Bi4Ti3O12Thin Films

Epitaxial growth of (SrBa)Nb2O6 thin films on SrTiO3 single crystal substrate

Epitaxial growth of Ba0.3Sr0.7TiO3 thin films on Al2O3(0001) using ultrathin TiN layer as a sacrificial template

Epitaxial∕amorphous Ba0.3Sr0.7TiO3 film composite structure for tunable applications

Fabrication and characterization of PZT thin-film vibrators for micromotors

article published in 1995

Ferroelectric Gate on AlGaN/GaN Heterostructures

Ferroelectric and piezoelectric properties of lanthanoid-substituted Bi4Ti3O12 thin films grown on (111)Pt and (100)IrO2 electrodes

Ferroelectric gate for control of transport properties of two-dimensional electron gas at AlGaN∕GaN heterostructures

Ferroelectric thin-films: the emancipation of ferroelectricity

scientific article published on 01 January 2007

Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors.

scientific article

Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film

scholarly article

Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon ⬇️

scholarly article

Geometry of Chemical Beam Vapor Deposition System for Efficient Combinatorial Investigations of Thin Oxide Films: Deposited Film Properties versus Precursor Flow Simulations

scientific article published on 22 February 2016

Growth of (111)-oriented PZT on RuO 2 (100)/Pt(111) electrodes by in-situ sputtering ⬇️

scholarly article

Growth process approaches for improved properties of tunable ferroelectric thin films

High Piezoelectric Longitudinal Coefficients in Sol-gel PZT Thin Film Multilayers

High figure-of-merit porous Pb1−xCaxTiO3 thin films for pyroelectric applications

High-Q AlN/SiO2 symmetric composite thin film bulk acoustic wave resonators

scientific article published in November 2008

Imaging by time-of-flight secondary ion mass spectrometry of plasma patterned metal and oxide thin films

In-situ sputter deposition of PT and PZT films on Platinum and RuO2 electrodes

Interferometric study of piezoelectric degradation in ferroelectric thin films

Is there a better material for thin film BAW applications than A1N?

Local Growth of Sol-Gel Films by Means of Microhotplates

Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes ⬇️

scientific article published on 01 August 2012

Microstructural and electrical properties of (Sr,Ba)Nb2O6 thin films grown by pulsed laser deposition

Nonvolatile gate effect in the PZT/AlGaN/GaN heterostructure

Pb(Zr,Ti)O3 thin films on zirconium membranes for micromechanical applications

scholarly article by Thomas Maeder et al published 5 February 1996 in Applied Physics Letters

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Piezoelectric materials parameters for piezoelectric thin films in GHz applications

scientific article published in February 2009

Piezoelectric micromachined ultrasonic transducers based on PZT thin films.

scientific article published in December 2005

Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices.

scientific article published in January 2007

Piezoelectrics in micro and nanosystems: solutions for a wide range of applications

scientific article published on May 2008

Processing and properties of thin film pyroelectric devices

Raman spectroscopy of sputtered AlN films: E2(high) biaxial strain dependence

Removal of 90° domain pinning in (100) Pb(Zr0.15Ti0.85)O3 thin films by pulsed operation

article published in 1998

Resonant PZT MEMS Scanner for High-Resolution Displays

article

Self Polarization in Pb(Sc1/2Ta1/2)O3Relaxor Thin Films: Impact on the Dielectric and Piezoelectric Response

Self-Assembled Perovskite-Fluorite Oblique Nanostructures for Adaptive (Tunable) Electronics

Shear mode coupling and tilted grain growth of A1N thin films in BAW resonators

scientific article published on 01 July 2006

Shear mode coupling and tilted grain growth of A1N thin films in BAW resonators

Strain relaxation of epitaxial SrTiO3 thin films on LaAlO3 by two-step growth technique

article by Tomoaki Yamada et al published 4 April 2005 in Applied Physics Letters

Strain-induced diffuse dielectric anomaly and critical point in perovskite ferroelectric thin films

scholarly article in Physical Review B, vol. 65 no. 1, December 2001

Structural and dielectric properties of strain-controlled epitaxial SrTiO3 thin films by two-step growth technique

article by Tomoaki Yamada et al published September 2005 in Journal of Applied Physics

Syngas generation from n-butane with an integrated MEMS assembly for gas processing in micro-solid oxide fuel cell systems.

scientific article published in November 2012

The Impact of chemical ordering on the dielectric properties of lead scandium tantalate Pb(Sc1∕2Ta1∕2)O3 thin films

Thin Film Piezoelectrics for MEMS

Thin film pyroelectric array as a detector for an infrared gas spectrometer

scholarly article

Transmission-electron-microscopy study of quasi-epitaxial tungsten-bronze (Sr2.5Ba2.5Nb10O30) thin film on perovskite (SrTiO3) single crystal

article

Tunable ferroelectric thin films with enhanced responses through nano-structural control

article

Tunable thin film bulk acoustic wave resonator based on BaxSr1-xTiO3 thin film

scientific article published on 01 January 2010

Tuning of direct current bias-induced resonances in micromachined Ba0.3Sr0.7TiO3 thin-film capacitors

article

Which PZT thin films for piezoelectric microactuator applications? ⬇️

scholarly article

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

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