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List of works by Esa Puukilainen

Atomic Layer Deposition of LaF3 Thin Films using La(thd)3 and TiF4 as Precursors

scientific article

Atomic Layer Deposition of LiF Thin Films from Lithd, Mg(thd)2, and TiF4 Precursors

Atomic Layer Deposition of Osmium

scholarly article by Jani Hämäläinen et al published 9 December 2011 in Chemistry of Materials

Atomic Layer Deposition of Ruthenium Films from (Ethylcyclopentadienyl)(pyrrolyl)ruthenium and Oxygen

scholarly article by Kaupo Kukli et al published 2011 in Journal of the Electrochemical Society

Atomic layer deposition and characterization of Bi₂Te₃ thin films

scientific article published on 21 August 2014

Atomic layer deposition, characterization, and growth mechanistic studies of TiO2 thin films

scientific article published on 18 June 2014

Evaluation and Comparison of Novel Precursors for Atomic Layer Deposition of Nb2O5 Thin Films

article

Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures

scholarly article by Jani Hämäläinen et al published 2011 in Journal of Materials Chemistry

Low temperature atomic layer deposition of noble metals using ozone and molecular hydrogen as reactants

Study of a novel ALD process for depositing MgF2 thin films

scientific article

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