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A new metalorganic chemical vapor deposition process for MoS2 with a 1,4-diazabutadienyl stabilized molybdenum precursor and elemental sulfur

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Description scientific article published on 23 September 2020
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author: David Zanders  Aleksander Kostka  Detlef Rogalla  Engin Ciftyürek  Nils Boysen  Klaus Schierbaum  Jan-Lucas Wree  Niklas Huster 

Publication date September 23, 2020
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