From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
| Image |  |
|---|---|
| Description | scientific article published on 28 April 2020 |
| Author/s |
author: Felix Mitschker Anjana Devi Detlef Rogalla Engin Ciftyürek Klaus Schierbaum Lukas Mai Claudia Bock |
| Publication date | April 28, 2020 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |