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High Aspect Ratio β-Ga2O3 Fin Arrays with Low-Interface Charge Density by Inverse Metal-Assisted Chemical Etching

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Description scientific article published on 24 June 2019
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author: Yuhui Ma  Munho Kim  Xiuling Li  Jian-Min Zuo  Hsien-Chih Huang 

Publication date June 24, 2019
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