Effect of Growth Temperature during the Atomic Layer Deposition of the SrTiO3 Seed Layer on the Properties of RuO2/SrTiO3/Ru Capacitors for Dynamic Random Access Memory Applications
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| Description | scientific article published on 21 November 2018 |
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author: Cheol Seong Hwang Woongkyu Lee |
| Publication date | November 21, 2018 |
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