Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WNxCy Thin Films
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| Description | scientific article published on 04 December 2017 |
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author: Nathaniel E Richey Lisa McElwee-White |
| Publication date | December 4, 2017 |
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