Characteristics of an Amorphous Carbon Layer as a Diffusion Barrier for an Advanced Copper Interconnect
| Image |  |
|---|---|
| Description | scientific article published on 31 December 2019 |
| Author/s |
author: Cheol-Woong Yang Jin-Su Oh Byeong-Seon An Changmin Lee Hyoungsub Kim Yena Kwon |
| Publication date | December 31, 2019 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |