Obtaining a Low and Wide Atomic Layer Deposition Window (150-275 °C) for In2 O3 Films Using an InIII Amidinate and H2 O
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| Description | scientific article published on 05 June 2018 |
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author: Sang Bok Kim Shao-Liang Zheng Luke M Davis Ashwin Jayaraman Danny Chua Sunghwan Lee Xizhu Zhao Roy G. Gordon |
| Publication date | June 5, 2018 |
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