A novel 2-step ALD route to ultra-thin MoS2 films on SiO2 through a surface organometallic intermediate
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| Description | scientific article published on 01 January 2017 |
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author: Elsje Alessandra Quadrelli François Martin Mathieu Frégnaux Chloé Thieuleux |
| Publication date | January 1, 2017 |
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