A new highly automated sputter equipment for in situ investigation of deposition processes with synchrotron radiation
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| Description | scientific article published on 01 April 2013 |
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author: Kai Schlage Peter Müller-Buschbaum Matthias Schwartzkopf Simon F Brunner Adeline Buffet Gonzalo Santoro Ezzeldin Metwalli |
| Publication date | April 1, 2013 |
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