Modeling the Point‐Spread Function in Helium‐Ion Lithography
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| Description | scientific article published on September 21, 2011 |
| Author/s |
author: Karl K Berggren |
| Publication date | September 21, 2011 |
| Language | English |
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| Wikipedia link | |
| Access work |
https://dspace.mit.edu/bitstream/1721.1/74145/1/Berggren-Modeling%20the%20point.pdf |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |