Mechanism for the atomic layer deposition of copper using diethylzinc as the reducing agent: a density functional theory study using gas-phase molecules as a model
| Image |  |
|---|---|
| Description | scientific article published on 22 August 2012 |
| Author/s | |
| Publication date | August 22, 2012 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |