Mold Design Rules for Residual Layer-Free Patterning in Thermal Imprint Lithography
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| Description | scientific article published on May 27, 2011 |
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author: Kookheon Char Kahp-Yang Suh |
| Publication date | May 27, 2011 |
| Language | English |
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| Missing/wrong data? | Edit Wikidata item |