Polymorphous silicon thin films obtained by plasma-enhanced chemical vapor deposition using dichlorosilane as silicon precursor
| Image |  |
|---|---|
| Description | scientific article published on 27 May 2009 |
| Author/s | |
| Publication date | May 27, 2009 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |