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Dissociative electron attachment to Pt(PF3)4—a precursor for Focused Electron Beam Induced Processing (FEBIP)

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Description scientific article published on December 21, 2011
Author/s

author: Michael Allan 

Publication date December 21, 2011
Language English
Country of origin
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http://pubs.rsc.org/en/content/articlepdf/2012/CP/C2CP23268E

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