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Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate

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Description scientific article published on 01 December 2010
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author: Seung-Woo Kim 

Publication date December 1, 2010
Language English
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https://www.osapublishing.org/viewmedia.cfm?URI=ao-49-34-6624&seq=0

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