Direct chemical in-depth profile analysis and thickness quantification of nanometer multilayers using pulsed-rf-GD-TOFMS
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| Description | scientific article published on 16 January 2010 |
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author: Alfredo Sanz-Medel Jorge Pisonero José I. Martín Carlos Quirós |
| Publication date | January 16, 2010 |
| Language | English |
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