Imido Complexes Derived from the Reactions of Niobium and Tantalum Pentachlorides with Primary Amines: Relevance to the Chemical Vapor Deposition of Metal Nitride Films
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| Description | scientific article published on 01 August 1996 |
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author: Brian S. Haggerty Arnold L. Rheingold |
| Publication date | August 1, 1996 |
| Language | English |
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