Width determination of SiO2-films in Si-based devices using low-loss EFTEM: image contrast as a function of sample thickness
| Image |  |
|---|---|
| Description | scientific article published on 01 January 2003 |
| Author/s |
author: Ferdinand Hofer Bernhard Schaffer |
| Publication date | January 1, 2003 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |