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High-K dielectric sulfur-selenium alloys

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Description scientific article published on 10 May 2019
Author/s

author: Andrew R Lupini  Bingqing Wei  Juan Carlos Idrobo  Anand B Puthirath  Sandhya Susarla  Albert Lerma  Chandra Sekhar Tiwary  Hector A. Calderon  Amey Apte  Ganguli Babu  David W Tam  Tong Li  Francisco Hernandez  Jordan A Hachtel 

Publication date May 10, 2019
Language English
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