Deposition and growth kinetics studies of thin zirconium dioxide films by UVILS-CVD
| Image |  |
|---|---|
| Description | scholarly article by Mingliang Chen et al published July 2007 in Applied Surface Science |
| Author/s |
author: Xinyu Zhang |
| Publication date | July 2007 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |