Conformality Investigation of Titanium Dioxide Thin Films on 3-D Micrometer- and Nanometer-scale Features by Pulsed-Pressure Metal-organic CVD
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| Description | scholarly article by Vilailuck Siriwongrungson et al published December 2011 in Chemical Vapor Deposition |
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author: Susan Krumdieck |
| Publication date | December 2011 |
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