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Selective sublimation processing of a molybdenum–tungsten mixed oxide thin film

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Description scholarly article by M. Ferroni et al published 2003 in Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena
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author: Elisabetta Comini  Matteo Ferroni  Vincenzo Guidi 

Publication date 2003
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