Growth of Dysprosium-, Scandium-, and Hafnium-based Third Generation High-κ Dielectrics by Atomic Vapor Deposition
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| Description | scholarly article by Christoph Adelmann et al published October 2007 in Chemical Vapor Deposition |
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author: Jürgen Schubert Christoph Adelmann |
| Publication date | October 2007 |
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