Surface Chemistry and Interface Formation during the Atomic Layer Deposition of Alumina from Trimethylaluminum and Water on Indium Phosphide
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| Description | article published in 2013 |
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author: Astrid De Clercq Jin Won Seo Jean-Pierre Locquet Christoph Adelmann Massimo Tallarida |
| Publication date | March 20, 2013 |
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