Gas-Phase Modeling of Chlorine-Based Chemical Vapor Deposition of Silicon Carbide
| Image |  |
|---|---|
| Description | scholarly article by Stefano Leone et al published 8 March 2012 in Crystal Growth & Design |
| Author/s |
author: Örjan Danielsson Olof Kordina Stefano Leone Erik Janzén Anne Henry |
| Publication date | March 8, 2012 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |