Growth Mechanism of SiC Chemical Vapor Deposition: Adsorption and Surface Reactions of Active Si Species
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Örjan Danielsson Olof Kordina Lars Ojamäe Erik Janzén |
| Publication date | December 22, 2017 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |