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Nanoscale Etching of GaAs and InP in Acidic H 2 O 2 Solution: A Striking Contrast in Kinetics and Surface Chemistry

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author: Dennis H. van Dorp  Sophia Arnauts  Johan Meersschaut  Timo Sajavaara  Mikko Laitinen  Thierry Conard 

Publication date August 2018
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