Plasma and surface diagnostics during plasma-enhanced chemical vapor deposition of SiO2 from SiH4/O2/Ar discharges
| Image |  |
|---|---|
| Description | scientific article published in December 1996 |
| Author/s |
author: Eray S. Aydil |
| Publication date | December 1996 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |