Effect of H2 addition on surface reactions during CF4/H2 plasma etching of silicon and silicon dioxide films
| Image |  |
|---|---|
| Description | scientific article published in September 1997 |
| Author/s |
author: Eray S. Aydil |
| Publication date | September 1997 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |