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Access resistance reduction in Ge nanowires and substrates based on non-destructive gas-source dopant in-diffusion

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Description scientific article published on 3 October 2014
Author/s

author: Ray Duffy  Patrick Carolan  Emanuele Pelucchi  Nikolay Petkov  Yordan M. Georgiev 

Publication date October 3, 2014
Language English
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