Effect of the blistering of ALD Al 2 O 3 films on the silicon surface in Al-Al 2 O 3 -Si structures
| Image |  |
|---|---|
| Description | article published in 2015 |
| Author/s | |
| Publication date | February 2015 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |