Review of electrical characterization of ultra-shallow junctions with micro four-point probes
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| Description | article by Dirch H. Petersen et al published January 2010 in Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B |
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author: Peter Bøggild Ole Hansen |
| Publication date | January 2010 |
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