Physical properties and microstructure of sputter deposited aluminum and zirconium oxynitride multilayers
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| Description | scholarly article by Valentino Rigato et al published September 2003 in Surface & Coatings Technology |
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author: Elza Bontempi Valentino Rigato Alessandro Patelli Laura E Depero |
| Publication date | September 2003 |
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| Missing/wrong data? | Edit Wikidata item |