Characterization of silicon carbide thin films grown on Si and SiO2/Si substrates
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| Description | scholarly article by P. Zanola et al published December 2004 in Materials Science and Engineering B: Advanced Functional Solid-state Materials |
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author: Elza Bontempi Gianni Barucca Laura E Depero Carlo Ricciardi |
| Publication date | December 2004 |
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