Missing/wrong data? Edit Wikidata item
Production and characterization of Si-N films obtained by r.f. magnetron sputtering
Author/s
Work details
Publication date:
October 1993
Language:
English
Copyright status
Copyright status information is not available for this work. The copyright status depends on the jurisdiction, the author's date of death and the date the work was created or published.
To learn more about copyright terms in different countries, visit the countries and terms page.