Comparative study of AZPN114 and SAL601 chemically amplified resists for electron beam nanolithography
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Annamaria Gerardino |
| Publication date | November 1998 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |