3D microstructures fabricated by partially opaque X-ray lithography masks
| Image |  |
|---|---|
| Description | article by S. Cabrini et al published June 2000 in Microelectronic Engineering |
| Author/s |
author: Annamaria Gerardino |
| Publication date | June 2000 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |