Metrology of semiconductor device structures by cross-sectional AFM
| Image |  |
|---|---|
| Description | scholarly article by C. Jenkins et al published March 2001 in Materials Science and Engineering B: Advanced Functional Solid-state Materials |
| Author/s |
author: Martin Elliott Emyr Macdonald |
| Publication date | March 2001 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |