Nonaqueous Atomic Layer Deposition of Aluminum Phosphate
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| Description | scientific article published on 26 June 2013 |
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author: Christiane A. Helm Dietrich R.T. Zahn Daisy Nestler Thomas Mäder |
| Publication date | June 26, 2013 |
| Language | English |
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| Missing/wrong data? | Edit Wikidata item |