Characterization of Ru thin-film conductivity upon atomic layer deposition on H-passivated Si(111)
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Yves Chabal |
| Publication date | December 2012 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |