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Structural and Functional Characterizations of Al+Implanted 4H-SiC Layers and Al+Implanted 4H-SiCp-nJunctions after 1950°C Post Implantation Annealing

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author: Andrea Parisini  Roberta Nipoti  Maurizio Puzzanghera  Antonella Parisini 

Publication date 2016
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