Influence of process conditions on chemical composition and electronic properties of AlN thin films prepared by ArF reactive pulsed laser deposition
| Image |  |
|---|---|
| Description | article |
| Author/s |
author: Saulius Kaciulis |
| Publication date | February 14, 2012 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |