Fine Tuning of Lithographic Masks through Thin Films of PS-b-PMMA with Different Molar Mass by Rapid Thermal Processing
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| Description | scientific article published on 07 May 2014 |
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author: Diego Antonioli Gabriele Seguini Michele Laus Oriano Francescangeli Valentina Gianotti Federico Ferrarese Lupi Michele Perego Katia Sparnacci Tommaso Jacopo Giammaria |
| Publication date | May 7, 2014 |
| Language | English |
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